AIXTRON SE: AIXTRON and ams OSRAM announce qualification of AIXTRON G5+ C and G10-AsP systems on 200mm wafers for Micro LED application

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EQS-Media / 07.02.2023 / 07:45 CET/CEST

Herzogenrath, Germany, Premstaetten, Austria, Munich, Germany, February 7, 2023 – AIXTRON SE (FSE: AIXA), a worldwide leading provider of deposition equipment to the semiconductor industry and ams OSRAM (SIX: AMS), a global leader in optical solutions, announced today that ams OSRAM has qualified AIXTRON AIX G5+ C and G10-AsP MOCVD systems on 200mm wafers for a Micro LED application.

The MOCVD systems AIX G5+ C and the new G10-AsP from AIXTRON SE offer AIXTRON planetary technology which is paving the pathway for the next generation of high-resolution Micro LED displays. In spring 2022, ams OSRAM had announced plans to create additional manufacturing capacity in 200mm for the production of LED and Micro LED at its existing location in Malaysia. The MOCVD systems are expected to help enable volume production of Micro LED for a new generation of display applications.

“AIXTRON and ams OSRAM have a long-standing cooperation, and we are familiar with the performance and quality standards of the equipment. For an ambitious project like the development and production of Micro LED for AsP and GaN devices, we needed exactly such a partner at our side”, says Robert Feurle, Executive Vice President and Head of Business Unit Opto Semiconductors at ams OSRAM.

Dr. Felix Grawert, CEO and President of AIXTRON SE, adds: “The G10-AsP and AIX G5+ C qualification at ams OSRAM is a very important milestone in our company’s history. ams OSRAM is a world-class LED manufacturer and perfectly positioned to enable the fundamental new technology that will come to market. We are on the verge of a technology shift away from conventional display technologies to a new type of Micro LED displays. Now, AIXTRON is entering one of the future’s growths markets that has an enormous potential, and we are doing this with a perfect partner at our side.”

Micro LED technology offers very significant advantages for display technology such as higher pixel density, longer lifetime, higher brightness, faster switching speed and a wider color spectrum. An important benefit is also the low relative energy consumption, which qualifies Micro LED ideally for upcoming generations of smaller display-equipped consumer devices which provide a very limited space for batteries.

The production of Micro LED comes with special requirements: Micro LED volume production includes a special transfer process where multiple thousands of LED chips (arrays) of just micrometers in size are picked up and transferred. Any defect can result in dead pixels that can make an entire array useless. Hence, an almost error-free epitaxy process is necessary, minimizing defects and allowing for high yield and economically viable production of Micro LED.

AIXTRON’s new G10-AsP epitaxy tool has been designed to address the specific needs of this application: It is the world's first fully automated AsP reactor offering cassette-to-cassette wafer loading as well as a cleaning mechanism based on in-situ etching. Together, these two features have a major impact on the yield performance. In addition, the AIXTRON system offers the advantages of batch reactor technology: it comes with the lowest production cost per wafer currently available in the market and the highest throughput per cleanroom area. At the same time, the new tool comes with precise flow and temperature control permitting the best material uniformities run after run.


Ragah Dorenkamp
Director Corporate Communications
fon +49 (2407) 9030-1830

Guido Pickert
Vice President Investor Relations & Corporate Communications
fon +49 (2407) 9030-444

AIXTRON’s new G10-AsP epitaxy tool is the world's first fully automated AsP reactor offering cassette-to-cassette (C2C) wafer loading as well as a cleaning mechanism based on in-situ etching.


AIXTRON SE is a leading provider of deposition equipment to the semiconductor industry. The Company was founded in 1983 and is headquartered in Herzogenrath (near Aachen), Germany, with subsidiaries and sales offices in Asia, United States and in Europe. AIXTRON´s technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and optoelectronic applications based on compound semiconductor materials. Such components are used in a broad range of innovative applications, technologies and industries. These include Laser and LED applications, display technologies, data transmission, SiC and GaN power management and conversion, communication, signaling and lighting as well as a range of other leading-edge applications.

Our registered trademarks: AIXACT®, AIXTRON®, , Close Coupled Showerhead®, EXP®, EPISON®, Gas Foil Rotation®, OptacapTM, OVPD®, Planetary Reactor®, PVPD®, STExS®, TriJet®

For further information on AIXTRON (FSE: AIXA, ISIN DE000A0WMPJ6) please visit our website at:

About ams OSRAM

The ams OSRAM Group (SIX: AMS) is a global leader in optical solutions. By adding intelligence to light and passion to innovation, we enrich people’s lives. This is what we mean by Sensing is Life.

With over 110 years of combined history, our core is defined by imagination, deep engineering expertise and the ability to provide global industrial capacity in sensor and light technologies. We create exciting innovations that enable our customers in the consumer, automotive, healthcare and industrial sectors maintain their competitive edge and drive innovation that meaningfully improves the quality of life in terms of health, safety and convenience, while reducing impact on the environment.

Our around 22,000 employees worldwide focus on innovation across sensing, illumination and visualization to make journeys safer, medical diagnosis more accurate and daily moments in communication a richer experience. Our work creates technology for breakthrough applications, which is reflected in over 15,000 patents granted and applied. Headquartered in Premstaetten/Graz (Austria) with a co-headquarters in Munich (Germany), the group achieved over EUR 5 billion revenues in 2021 and is listed as ams-OSRAM AG on the SIX Swiss Exchange (ISIN: AT0000A18XM4).

Find out more about us on

ams is a registered trademark of ams-OSRAM AG. In addition many of our products and services are registered or filed trademarks of ams OSRAM Group. All other company or product names mentioned herein may be trademarks or registered trademarks of their respective owners.

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Forward-Looking Statements

This document may contain forward-looking statements regarding the business, results of operations, financial condition and earnings outlook of AIXTRON. These statements may be identified by words such as “may”, “will”, “expect”, “anticipate”, “contemplate”, “intend”, “plan”, “believe”, “continue” and “estimate” and variations of such words or similar expressions. These forward-looking statements are based on our current assessments, expectations and assumptions, of which many are beyond control of AIXTRON, and are subject to risks and uncertainties. You should not place undue reliance on these forward-looking statements. Should these risks or uncertainties materialize, or should underlying expectations not occur or assumptions prove incorrect, actual results, performance or achievements of AIXTRON may materially vary from those described explicitly or implicitly in the relevant forward-looking statement. This could result from a variety of factors, such as actual customer orders received by AIXTRON, the level of demand for deposition technology in the market, the timing of final acceptance of products by customers, the condition of financial markets and access to financing for AIXTRON, general conditions in the market for deposition plants and macroeconomic conditions, cancellations, rescheduling or delays in product shipments, production capacity constraints, extended sales and qualification cycles, difficulties in the production process, the general development in the semi-conductor industry, increased competition, fluctuations in exchange rates, availability of public funding, fluctuations and/or changes in interest rates, delays in developing and marketing new products, a deterioration of the general economic situation and any other factors discussed in any reports or other announcements , in particular in the chapter Risks in the Annual Report, filed by AIXTRON. Any forward-looking statements contained in this document are based on current expectations and projections of the executive board based on information available the date hereof. AIXTRON undertakes no obligation to revise or update any forward-looking statements as a result of new information, future events or otherwise, unless expressly required to do so by law.

This document is an English language translation of a document in German language. In case of discrepancies, the German language document shall prevail and shall be the valid version.

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